Nanostructural changes upon substitutional Al doping in ZnO sputtered films
| Autor: | Fernando Agulló-Rueda, Pilar Herrero, Elena Navarrete-Astorga, J.R. Ramos-Barrado, M. Gabas, Efraín Ochoa-Martínez, J. Santiso, Angel R. Landa-Cánovas |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Diffraction
Nanostructure Materials science Al doping Analytical chemistry 02 engineering and technology Crystal structure 01 natural sciences symbols.namesake Electrical resistivity and conductivity 0103 physical sciences Materials Chemistry 010302 applied physics Telecomunicaciones Process Chemistry and Technology Doping Química Sputter deposition 021001 nanoscience & nanotechnology Surfaces Coatings and Films Electronic Optical and Magnetic Materials TCO Transmission electron microscopy Ceramics and Composites symbols ZnO 0210 nano-technology Raman spectroscopy |
| Zdroj: | Recercat: Dipósit de la Recerca de Catalunya Varias* (Consorci de Biblioteques Universitáries de Catalunya, Centre de Serveis Científics i Acadèmics de Catalunya) Ceramics International, ISSN 0272-8842, 2019-04-01, Vol. 45, No. 5 Dipòsit Digital de Documents de la UAB Universitat Autònoma de Barcelona Archivo Digital UPM Universidad Politécnica de Madrid Recercat. Dipósit de la Recerca de Catalunya instname |
| Popis: | Al:ZnO layers, with low and high Al content, 0.2% and 2.1% cat. respectively, have been prepared using the RF magnetron sputtering technique. Noticeable differences in the optical and electrical properties have been detected in these films. With doping, the resistivity decreases and the band-gap increases. The alterations in the films crystalline structure are explained in terms of the nanostructural changes induced by Al substitutional doping, such as a higher concentration of edge dislocation defects and a higher rotation of crystalline nanodomains in the plane of the films (normal to the preferential orientation c-axis) for the high content Al:ZnO layer. A complete description of such effects has been accomplished using several characterization techniques, such as X-ray diffraction, Raman spectroscopy and transmission electron microscopy. The combination of these techniques provides an exhaustive understanding of the films nanostructure. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|