Batch production of silicon fiber-top cantilever devices
| Autor: | Davide Iannuzzi, R. Verdoold, Steven V. Beekmans, J.H. Rector, Martin Slaman |
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| Přispěvatelé: | Physics and Astronomy, Biophotonics and Medical Imaging, Photo Conversion Materials, Amsterdam Neuroscience - Brain Imaging, LaserLaB - Biophotonics and Microscopy |
| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
Photolithography
Optical fiber Fabrication Materials science Nanotechnology 02 engineering and technology 01 natural sciences GeneralLiterature_MISCELLANEOUS law.invention fiber-top device 010309 optics batch production law 0103 physical sciences Fiber SDG 7 - Affordable and Clean Energy cantilever Innovation Lithography Microelectromechanical systems 021001 nanoscience & nanotechnology MEMS Resist and Infrastructure SDG 9 - Industry Innovation and Infrastructure 0210 nano-technology Batch production SDG 9 - Industry |
| Zdroj: | Rector, J H, Beekmans, S V, Slaman, M, Verdoold, R & Iannuzzi, D 2017, Batch production of silicon fiber-top cantilever devices . in 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017-Proceedings ., 8051500, ACM, IEEE Computer Society, 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017, Santa Fe, United States, 13/08/17 . https://doi.org/10.1109/OMN.2017.8051500 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017-Proceedings |
| DOI: | 10.1109/OMN.2017.8051500 |
| Popis: | We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. Here, the stepwise fabrication procedure is described and the performance of the final device is demonstrated. |
| Databáze: | OpenAIRE |
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