Monitoring the formation of oxide apertures in micropillar cavities
| Autor: | Morten P. Bakker, Pierre Petroff, H.J. Snijders, Dirk Bouwmeester, Donald J. Suntrup, Martin P. van Exter, Tuan-Ahn Truong |
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| Rok vydání: | 2013 |
| Předmět: |
Fabrication
Materials science Physics and Astronomy (miscellaneous) Oxide FOS: Physical sciences 02 engineering and technology Waveguide (optics) 01 natural sciences Slot-waveguide chemistry.chemical_compound Optics 0103 physical sciences White light 010306 general physics Thermal oxidation Quantum Physics Small volume business.industry Distributed Bragg reflector 021001 nanoscience & nanotechnology chemistry Optoelectronics Imaging technique business Quantum Physics (quant-ph) 0210 nano-technology Microphotonics Layer (electronics) Physics - Optics Optics (physics.optics) |
| Zdroj: | CLEO: 2013. |
| Popis: | An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector (DBR) mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step. |
| Databáze: | OpenAIRE |
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