Fluorinated β-diketonate complexes M(tfac)2(TMEDA) (M = Fe, Ni, Cu, Zn) as precursors for the MOCVD growth of metal and metal oxide thin films

Autor: Christian Stienen, Julian Grahl, Christoph Wölper, Stephan Schulz, Georg Bendt
Rok vydání: 2022
Předmět:
Zdroj: RSC Advances. 12:22974-22983
ISSN: 2046-2069
DOI: 10.1039/d2ra01338j
Popis: CA Bendt Partially fluorinated beta-diketonate complexes M(tfac)(2)(TMEDA) (M = Fe 1, Ni 2, Cu 3, Zn 4; tfac = 1,1,1-trifluoro-2,4-pentanedionate; TMEDA = N,N,N',N'-tetramethylethylenediamine) were synthesized and structurally (sc-XRD) and thermochemically (TGA) characterised. A new polymorph of Fe(tfac)(2)(TMEDA) was found. The structural and physicochemical properties of 1-4 were compared with related M(acac)(2)(TMEDA) and M(hfac)(2)(TMEDA) (acac = 2,4-pentanedionate, hfac = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate) beta-diketonate complexes to evaluate the effect of the degree of fluorination. A positive effect on the thermal behaviour of the metal acetylacetonates was observed, but no discernible trends. Application of complexes 1-4 as precursors in a MOCVD process yielded either metal (Ni, Cu) or metal oxide thin films (Fe3O4, ZnO), which were further oxidized to NiO, CuO and alpha-Fe2O3 films by calcination in air at 500 degrees C.
Databáze: OpenAIRE