Fast-Response Electrostatic Actuator Based on Nano-Gap
| Autor: | E. G. Kostsov, Alexei Sokolov |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
0209 industrial biotechnology
Materials science lcsh:Mechanical engineering and machinery large force Nanotechnology 02 engineering and technology Article fast driver 020901 industrial engineering & automation Comb drive Nano electrostatic actuator nanometer gap Microelectronics Energy transformation lcsh:TJ1-1570 Electrical and Electronic Engineering business.industry Mechanical Engineering 021001 nanoscience & nanotechnology Electrostatic actuator Ferroelectricity Control and Systems Engineering Optoelectronics ferroelectric Nanometre 0210 nano-technology business Actuator |
| Zdroj: | Micromachines; Volume 8; Issue 3; Pages: 78 Micromachines Micromachines, Vol 8, Iss 3, p 78 (2017) |
| ISSN: | 2072-666X |
| DOI: | 10.3390/mi8030078 |
| Popis: | The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented. |
| Databáze: | OpenAIRE |
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