Optical and structural characterization of Ge clusters embedded in ZrO2
| Autor: | Larysa Khomenkova, Andrew Rossall, J. A. van den Berg, Emil Agocs, Johannes Heitmann, David Lehninger, Bálint Fodor, S. Ponomaryov, Volodymyr O. Yukhymchuk, Peter Petrik, Benjamin Kalas, Zsolt Zolnai, O. Gudymenko |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Scattering Annealing (metallurgy) Analytical chemistry General Physics and Astronomy chemistry.chemical_element Germanium 02 engineering and technology Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films Ion Nanoclusters chemistry Homogeneous 0103 physical sciences Spectroscopic ellipsometry 0210 nano-technology QC |
| Zdroj: | Applied Surface Science. 421:283-288 |
| ISSN: | 0169-4332 |
| Popis: | The change of optical and structural properties of Ge nanoclusters in ZrO 2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO 2 and Ge-rich-ZrO 2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO 2 layers alternated by 5-nm-ZrO 2 ones. Germanium nanoclusters in ZrO 2 host were formed by rapid-thermal annealing at 600–800 °C during 30 s in nitrogen atmosphere. Reference optical properties for pure ZrO 2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect