Impact of channel orientation on low frequency noise performances of UTBOX nMOSFETs operated at liquid nitrogen temperature

Autor: O. Touayar, B. Cretu, Eddy Simoen, B. Nafaa, N. Ismail
Přispěvatelé: Equipe Electronique - Laboratoire GREYC - UMR6072, Groupe de Recherche en Informatique, Image et Instrumentation de Caen (GREYC), Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU)-Normandie Université (NU)-Université de Caen Normandie (UNICAEN), Normandie Université (NU)-Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN), Normandie Université (NU), Institut National des Sciences Appliquées et de Technologie - Carthage (INSAT Carthage), IMEC (IMEC), Catholic University of Leuven - Katholieke Universiteit Leuven (KU Leuven)
Jazyk: angličtina
Rok vydání: 2017
Předmět:
Zdroj: 2017 International Conference on Noise and Fluctuations (ICNF)
2017 International Conference on Noise and Fluctuations (ICNF), Jun 2017, Vilnius, France. ⟨10.1109/ICNF.2017.7985964⟩
Popis: Low frequency noise is investigated in n-type UTBOX transistors presenting different channel orientations (standard μ100ξ and rotated μ110ξ). It was observed that decreasing temperature reduces the 1/f noise level particularly for a short rotated device. However, unexpected variation of the flicker noise in strong inversion was observed for the long rotated channel. Furthermore, evolution of generation-recombination noise as a function of temperature is investigated to identify traps and evaluate the quality of the Si film.
Databáze: OpenAIRE