Realization of Thin Film Specimens for Micro Tensile Tests
| Autor: | C. Malhaire, C. Josserond, L. Debove, S. Brida, M. Ignat, K. Dogheche |
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| Přispěvatelé: | INL - Dispositifs Electroniques (INL - DE), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), Laboratoire de physique de la matière (LPM), Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de thermodynamique et physico-chimie métallurgiques (LTPCM), Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique de Grenoble (INPG), AUXITROL SA, Esterline Sensors Group, Malhaire, Christophe |
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Fabrication Silicon [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology 01 natural sciences [SPI.MECA.MEMA] Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph] chemistry Etching (microfabrication) 0103 physical sciences [SPI.MECA.MEMA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph] Thin film Composite material [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology Beam (structure) ComputingMilieux_MISCELLANEOUS Tensile testing |
| Zdroj: | TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2007, Lyon, France |
| Popis: | This paper is focused on specimen's design and fabrication for micro tensile tests. The experimental approach is based on a new micro tensile testing system and the development of silicon frames sustaining submicron thick self-standing films. The beam design has been optimized using Finite Element Simulations. SiN and Al beams with very large length on thickness ratio have been released from silicon substrate using standard etching process. The experimental force-displacement curve that has been obtained on a 3 mm x 400 mum times 1 mum aluminum beam is shown and discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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