Disc-Carving Optimization Based on Algorithm of ICP TMDE Model

Autor:	Huan-song Yang, Sun-tao Qin, Jian Zhang
Jazyk:	angličtina
Předmět:	Carving Chemistry ICP General Medicine Plasma Hardware_PERFORMANCEANDRELIABILITY Optimizeation Multiplexing Etching Etching (microfabrication) Algerithm Line (geometry) Hardware_INTEGRATEDCIRCUITS TMDE Algorithm Engineering(all)
Zdroj:	Procedia Engineering. :392-396
ISSN:	1877-7058
DOI:	10.1016/j.proeng.2011.08.075
Popis:	It is a main techniques that Time Multiplexed Deep Etching(TMDE) in Inductive Couple Plasmas (ICP), we designed a simulation program of TMDE based on the modeling research and experiments, solved distinguish different etching material and etching geometry based on traditional line algorithm, optimized etching way efficiently
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7c5a6a95bda0f341928aff563d44f221 Zobrazit plný text záznamu