p-Si(100)/InGaN thin film structure and investigation of its physical properties: N2 gas flow effect
| Autor: | Erman Erdoğan, Mutlu Kundakçı, Ahmet Emre Kasapoğlu, Emre Gür |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Diffraction Physical properties Materials science Band gap Analytical chemistry 02 engineering and technology Substrate (electronics) Surface finish 021001 nanoscience & nanotechnology 01 natural sciences Volumetric flow rate Root mean square InGaN thin film 0103 physical sciences Surface roughness N-2 gas flow Thin film 0210 nano-technology Magnetron sputtering |
| Zdroj: | Materials Today: Proceedings. 18:1868-1874 |
| ISSN: | 2214-7853 |
| DOI: | 10.1016/j.matpr.2019.06.675 |
| Popis: | International Congress on Semiconductor Materials and Devices (ICSMD) -- AUG 17-19, 2017 -- Selcuk Univ, Konya, TURKEY In this study, effect of N-2 gas flow rates on structural, optical and morphological properties of InGaN thin films grown by Radio Frequency Magnetron Sputtering (RFMS) method on p-Si (100) substrate have been investigated. X-ray diffraction (XRD) measurements confirmed that InGaN thin films have been successfully deposited and exhibited diffraction peak belong to (002) plane for each film. The surface roughness of InGaN thin films has been determined by using Atomic Force Microscopy (AFM) and the roughness value is about 13 nm with a maximum height of 36 nm and a maximum depth of 37 nm. The surface roughness value Rq\RMS value is 15 nm, which is almost consistent with the linear roughness value for 0 sccm. The energy band gap of the film was determined by using the optical reflectance spectra and the value of the band gap energy is found to be 2.01, 1.77 eV and 2.26 eV for 0 sccm, 1 sccm and 2 sccm N-2 gas flow rates, respectively. (C) 2019 Elsevier Ltd. All rights reserved. |
| Databáze: | OpenAIRE |
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