Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics
| Autor: | Ulrich Waldschläger, Philippe Jonnard, Meiyi Wu, Jonas Baumann, Ioanna Mantouvalou, Veronika Szwedowski-Rammert, Armin Gross, Gesa Goetzke, Evgueni Meltchakov, Franck Delmotte, Birgit Kanngießer, Philipp Hönicke |
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| Přispěvatelé: | Technical University of Berlin, Physikalisch-Technische Bundesanstalt [Berlin] (PTB), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Bruker Nano GmbH, Institut d'Optique Graduate School (IOGS) |
| Rok vydání: | 2020 |
| Předmět: |
Physics - Instrumentation and Detectors
Materials science FOS: Physical sciences Synchrotron radiation Applied Physics (physics.app-ph) Radiation 01 natural sciences Analytical Chemistry Optics 0103 physical sciences Instrumentation ComputingMilieux_MISCELLANEOUS Spectroscopy 010302 applied physics Profiling (computer programming) Water window business.industry 010401 analytical chemistry Physics - Applied Physics Instrumentation and Detectors (physics.ins-det) X-Ray Fluorescence Spectroscopy Atomic and Molecular Physics and Optics 0104 chemical sciences [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other] Nanometre business Layer (electronics) |
| Zdroj: | Spectrochimica Acta Part B: Atomic Spectroscopy Spectrochimica Acta Part B: Atomic Spectroscopy, Elsevier, 2020, 174, pp.105995. ⟨10.1016/j.sab.2020.105995⟩ |
| ISSN: | 0584-8547 |
| DOI: | 10.1016/j.sab.2020.105995 |
| Popis: | Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibility for non-destructive elemental depth profiling with commercial laboratory equipment using four real-life CrSc multilayer samples. Comparative measurements at the laboratory of PTB at the synchrotron radiation facility BESSY II confirm the results and prove the potential of laboratory equipment for the reliable analysis of stratified materials with sub-nanometer layer thicknesses. |
| Databáze: | OpenAIRE |
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