Electron Microscopy and X‐Ray Diffraction Determinations of Strain Release in InGaAs / GaAs Superlattices Grown by Molecular Beam Epitaxy

Autor: M.G. Simeone, C. E. Norman, Laura Lazzarini, M.R. Bruni, Faustino Martelli, Lucia Nasi, Giancarlo Salviati, Claudio Ferrari
Rok vydání: 1993
Předmět:
Zdroj: Scopus-Elsevier
ISSN: 1945-7111
0013-4651
DOI: 10.1149/1.2220836
Popis: Strain-induced dislocations have been studied in low and medium mismatched (001) oriented In x Ga 1-x As/GaAs superlattice heterostructures. Their optical quality, composition, residual strain, dislocation nature, and location have been studied by x-ray diffraction and electron microscopy techniques. Different predictions of the residual strain have been discussed briefly. All the samples presented perpendicular networks of misfit dislocations with different densities along the [110] and [110] directions. The dislocations were confined inside the buffer layer or at the buffer-superlattice interface without threading the superlattice
Databáze: OpenAIRE