Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation
| Autor: | Mirjana M. Novaković, Pavol Noga, Zlatko Rakočević, Maja Popović, Dušan Vaňa |
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| Rok vydání: | 2020 |
| Předmět: |
Amorphous silicon
Nuclear and High Energy Physics Materials science Alloy Analytical chemistry Nanoparticle 02 engineering and technology engineering.material 010402 general chemistry 01 natural sciences Monocrystalline silicon chemistry.chemical_compound Lattice constant Ion beam implantation Instrumentation Bimetallic nanoparticles TEM analysis 021001 nanoscience & nanotechnology Rutherford backscattering spectrometry 0104 chemical sciences Ion implantation Au-Ag alloy chemistry Transmission electron microscopy engineering 0210 nano-technology |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| ISSN: | 0168-583X |
| DOI: | 10.1016/j.nimb.2020.03.021 |
| Popis: | Au-Ag alloy nanoparticles were formed into amorphous silicon by sequential ion implantation of Au and Ag. Monocrystalline Si was amorphized at the initial moment of implantation with 1 × 1016 ions/cm2 gold ions, and then different silver fluences were applied in the range of 1 × 1016–1 × 1017 ions/cm2. After implantations the samples were investigated by means of Rutherford backscattering spectrometry and transmission electron microscopy. The nanoparticles were found to be formed at surface and sub-surface regions of the Si substrate, at depths corresponding to the maximum distribution of Au and Ag ions. The particles are crystalline in nature with sizes from 2 nm to 30 nm in diameter, increasing with silver ion fluence. Although the lattice constants of gold and silver are too close to be distinguished by measuring the characteristic interplanar spacings, imaging in scanning transmission mode confirms the formation of Au-Ag bimetallic nanoparticles, presenting a solid-solution alloy of gold and silver. |
| Databáze: | OpenAIRE |
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