Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology
| Autor: | Jacques Gierak, Ralf Jede, Lothar Bischoff, Paul Mazarov, L. Bruchhaus |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Liquid Metal Ion Source Liquid metal Materials science Process Chemistry and Technology Polyatomic ion nongallium Nanotechnology 02 engineering and technology nanoscience 021001 nanoscience & nanotechnology 01 natural sciences Focused ion beam Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion Nanolithography Physics::Plasma Physics 0103 physical sciences Materials Chemistry Electrical and Electronic Engineering 0210 nano-technology Instrumentation Metal clusters |
| Zdroj: | Journal of Vacuum Science & Technology B 36(2018)6, 06J101-1-06J101-6 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/1.5047150 |
| Popis: | In this article, the authors review, compare, and discuss the characteristics and applicative potential of a variety of nongallium ion liquid metal ion sources they have developed and successfully applied to nanopatterning. These sources allow generating on-demand ion beams and are promising for extending focused ion beams applications. They detail the operating characteristics of such sources capable to emit metal projectiles ranging from atomic ions with different charge states to polyatomic ions and to large metal clusters having sizes up to a few nanometers. They highlight their interest and relevance to current nanoscience challenges in terms of ultimate patterning or bottom-up nanofabrication capabilities. |
| Databáze: | OpenAIRE |
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