Fabrication of spectrally sharp Si-based dielectric resonators: combining etaloning with Mie resonances
| Autor: | D. Toliopoulos, 1, 2 M. Khoury, 1 M. Bouabdellaoui, 1 N. Granchi, 3 J.-B. Claude, 4 A. Benali, 1 I. Berbezier, 1 D. Hannani, 1 A. Ronda, 1 J. Wenger, 4 M. Bollani, 5 M. Gurioli, 1 S. Sanguinetti, 2, 5 F. Intonti, 3, M. Abbarchi1 |
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| Přispěvatelé: | Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Toliopoulos, D, Khoury, M, Bouabdellaoui, M, Granchi, N, Claude, J, Benali, A, Berbezier, I, Hannani, D, Ronda, A, Wenger, J, Bollani, M, Gurioli, M, Sanguinetti, S, Intonti, F, Abbarchi, M, Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Mie Resonators
dewetting silicon Materials science Mie scattering Silicon on insulator 02 engineering and technology 01 natural sciences 7. Clean energy law.invention 010309 optics Monocrystalline silicon [SPI]Engineering Sciences [physics] Optics law Etching (microfabrication) 0103 physical sciences Wafer Dewetting FIS/03 - FISICA DELLA MATERIA ComputingMilieux_MISCELLANEOUS Scattering business.industry Mie resonances 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics silicon dewetting dielectric resonators Photolithography 0210 nano-technology business |
| Zdroj: | Optics Express Optics Express, Optical Society of America-OSA Publishing, 2020, 28 (25), pp.37734. ⟨10.1364/OE.409001⟩ Optics express (2020). doi:10.1364/OE.409001 info:cnr-pdr/source/autori:D. Toliopoulos,1,2 M. Khoury,1 M. Bouabdellaoui,1 N. Granchi,3 J.-B. Claude,1,4 A. Benali,1 I. Berbezier,1 D. Hannani,1 A. Ronda,1 J. Wenger,4 M. Bollani,5 M. Gurioli,1 S. Sanguinetti,2,5 F. Intonti,3 and M. Abbarchi1/titolo:Fabrication of spectrally sharp Si-based dielectric resonators: Combining etaloning with Mie resonances/doi:10.1364%2FOE.409001/rivista:Optics express/anno:2020/pagina_da:/pagina_a:/intervallo_pagine:/volume Optics Express, 2020, 28 (25), pp.37734. ⟨10.1364/OE.409001⟩ |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/OE.409001⟩ |
| Popis: | We use low-resolution optical lithography joined with solid state dewetting of crystalline, ultra-thin silicon on insulator (c-UT-SOI) to form monocrystalline, atomically smooth, silicon-based Mie resonators in well-controlled large periodic arrays. The dewetted islands have a typical size in the 100 nm range, about one order of magnitude smaller than the etching resolution. Exploiting a 2 µm thick SiO2 layer separating the islands and the underlying bulk silicon wafer, we combine the resonant modes of the antennas with the etalon effect. This approach sets the resonance spectral position and improves the structural colorization and the contrast between scattering maxima and minima of individual resonant antennas. Our results demonstrate that templated dewetting enables the formation of defect-free, faceted islands that are much smaller than the nominal etching resolution and that an appropriate engineering of the substrate improves their scattering properties. These results are relevant to applications in spectral filtering, structural color and beam steering with all-dielectric photonic devices. |
| Databáze: | OpenAIRE |
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