Alumina and LTCC technology for RF MEMS switches and true time delay lines
| Autor: | S. Catoni, Anna Maria Fiorello, M. Ladhes, Kari Kautio, Romolo Marcelli, R. Buttiglione, G. De Angelis, M. Dispenza, Kari Rönkä |
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| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Předmět: | |
| Zdroj: | Buttiglione, R, Catoni, S, De Angelis, G, Dispenza, M, Fiorello, A, Kautio, K, Lahdes, M, Marcelli, R & Rönkä, K 2008, Alumina and LTCC technology for RF MEMS switches and true time delay lines . in Proceedings of the 3rd European Microwave Integrated Circuit Conference, EuMIC 2008 . IEEE Institute of Electrical and Electronic Engineers, Piscataway, NJ, USA, pp. 366-369, 3rd European Microwave Integrated Circuit Conference, EuMIC 2008, Amsterdam, Netherlands, 27/10/08 . https://doi.org/10.1109/EMICC.2008.4772305 3rd European Microwave Integrated Circuits Conference, EuMW 2008, pp. 366–369, Amsterdam, The Netherlands, 27-31 October 2008 info:cnr-pdr/source/autori:Buttiglione R, Catoni S, De Angelis G, Dispenza M, Fiorello A, Kautio K, Ladhes M, Marcelli R, Ronka K/congresso_nome:3rd European Microwave Integrated Circuits Conference, EuMW 2008/congresso_luogo:Amsterdam, The Netherlands/congresso_data:27-31 October 2008/anno:2008/pagina_da:366/pagina_a:369/intervallo_pagine:366–369 |
| DOI: | 10.1109/EMICC.2008.4772305 |
| Popis: | The technology for the realization of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations. Alumina and LTCC structures for validating the technological process on the individual switches have been obtained and characterized. Static delay lines on LTCC have been manufactured and tested to get the expected electrical performances for the final configuration. |
| Databáze: | OpenAIRE |
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