Synthesis of cubic boron nitride thin films
| Autor: | A. Durandet, A.J. Perry, H. Persing, B. W. James, W.D. McFall, David R. McKenzie, Rod Boswell, S. Reisch, Ian Falconer |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Materials science
Condensed matter physics Physics::Optics Mineralogy Surfaces and Interfaces General Chemistry Nitride Condensed Matter Physics Microstructure Crystal structure of boron-rich metal borides Computer Science::Other Surfaces Coatings and Films Gibbs free energy Condensed Matter::Materials Science symbols.namesake chemistry.chemical_compound Helicon chemistry Boron nitride Condensed Matter::Superconductivity Phase (matter) Physics::Atomic and Molecular Clusters Materials Chemistry symbols Thin film |
| Zdroj: | Scopus-Elsevier |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/0257-8972(95)02419-0 |
| Popis: | An equilibrium thermodynamic analysis of the Gibbs free energy in a non-hydrostatic stress field is applied to the formation of boron nitride thin films. The theory predicts a specific sequence of microstructures from non-oriented hexagonal boron nitride, through oriented hexagonal boron nitride and finally cubic boron nitride. It also predicts a threshold stress for cubic boron nitride formation. These predictions are in agreement with experimental observations reported here and made by others. The synthesis of cubic boron nitride in a new helicon wave plasma source is demonstrated. The operating parameters which produce the cubic phase are determined. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect