| Autor: |
Hongyan Xu, Zihan Wei, Verpoort, Francis, Hu, Jie, Zhuiykov, Serge |
| Rok vydání: |
2020 |
| DOI: |
10.6084/m9.figshare.11863293 |
| Popis: |
Additional file 1: Figure S1. Ellipsometry data for deposition of thicker ZnO for building reliable optical constants (a), device schematic indicating Au/Cr pads in dark green (separated by 200 μm) and the dicing/alignment in markers in light green (20 μm) (b), microcrograph of the edge of four individual devices, as per the mask design a 40 μm gap is allotted for dicing and each Au/Cr pad is inset from the edge of the 1.0 x 1.0 cm die by 50 μm (c), micrograph of 200 m Au/Cr pad separation of 2 individual devices (d) with 3D AFM image of Au/Cr layer step height (e). Figure S2. Experimental and model generated data for variable angle spectroscopic ellipsometric measurements of ALD developed ZnO with initial thickness of (a) 0.9 nm and (b) 1.3 nm. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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