In-situ scanning electron microscopy study of fracture events during back-end-of-line microbeam bending tests

Autor:	Mireia Bargallo Gonzalez, Houman Zahedmanesh, Joseph Lefebvre, S. Bhowmick, Kris Vanstreels, Hugo Bender, I. De Wolf
Jazyk:	angličtina
Rok vydání:	2014
Předmět:	Back end of line Materials science Physics and Astronomy (miscellaneous) Delamination Fracture (geology) Fracture mechanics Bending Microbeam Composite material Elastic modulus Beam (structure)
Popis:	This paper demonstrates the direct observation of crack initiation, crack propagation, and interfacial delamination events during in-situ microbeam bending tests of FIB milled BEOL structures. The elastic modulus and the critical force of fracture of the BEOL beam samples were compared for beams of different length and width. ispartof: Applied Physics Letters vol:105 issue:21 status: published
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::783679e316705afdd1a775cb9d187b07 https://lirias.kuleuven.be/handle/123456789/482171 Zobrazit plný text záznamu