Dielectric properties of Mn doped Bismuth Barium Titanate based ceramic thin films prepared by PLD technique
| Autor: | Andrei Vorobiev, Spartak Gevorgian, Farid Touati, Shoaib Mallick, Zubair Ahmad |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
Permittivity
Materials science Bismuth Barium Titanate Mn doped BF-BT thin films chemistry.chemical_element Thin-film bulk acoustic resonator 02 engineering and technology Dielectric 01 natural sciences Bismuth chemistry.chemical_compound 0103 physical sciences Materials Chemistry Thin film Composite material Tunable FBAR 010302 applied physics Process Chemistry and Technology 021001 nanoscience & nanotechnology Ferroelectricity Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Dielectric properties Barium titanate Ceramics and Composites Dielectric loss PLD technique 0210 nano-technology |
| Popis: | In this article, the effect of Mn doping on the permittivity and dielectric loss in 0.67BiFeO3-0.33BaTiO3 (BF-BT) based film bulk acoustic resonator test structures has been investigated. BF-BT thin films were deposited on the fused silica substrates with Pt/TiO2/Ti as bottom electrode. During the study of the BF-BT based parallel-plate structures, it has been revealed that BF-BT is in the ferroelectric state at room temperature. Higher permittivity (ԑ) is observed at a growth temperature of 600 °C and lower dielectric loss is achieved at 0.3 wt% Mn doping contents. These results show that the proposed BF-BT based FBAR test structure has a great potential for applications in tunable thin Film Bulk Acoustic Resonator (FBAR) devices. Comparison of the measured and simulation results has been made by utilizing the Mason equivalent circuit. This work was made possible by GSRA3-1-1116-14016 from the Qatar National Research Fund (a member of Qatar Foundation). The findings made herein are solely the responsibility of the authors. Scopus |
| Databáze: | OpenAIRE |
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