Popis: |
In this paper, the design, fabrication and characterization of a sensor is presented, optimized for sensing changes of the absorption coefficient of a monomolecular transduction layer, while at the same time being insensitive to environmental absorption changes. A functional analysis of the device is given, relating the effect of technological uncertainties to systematic errors in the determination of the measurand. A physical implementation of the functional design based on dual mode interrogation, using a polarization converter and polarization splitter, is presented and fabricated. From a tolerance analysis, using the values of the applied SiON technology, it was derived that, over a range of 1 decade, this implementation allows for an inaccuracy of an uncalibrated sensor |