Vacuum-packaged piezoelectric vibration energy harvesters: Damping contributions and autonomy for a wireless sensor system
Autor: | R. van Schaijk, C de Nooijer, Dennis Hohlfeld, S. Matova, TM Talal Kamel, M. Goedbloed, L. Caballero, Valer Pop, M. Renaud, M. Jambunathan, R. Elfrink |
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Přispěvatelé: | IMEC/Holst Centre, Eindhoven, Netherlands |
Jazyk: | angličtina |
Rok vydání: | 2010 |
Předmět: |
Materials science
Vacuum Damping contribution Wireless sensor system Energy Harvester Piezoelectricity Mechanical engineering Vacuum packaging HOL - Holst Vibration energies High Tech Systems & Materials Wafer-scale Damping Nitrides chemistry.chemical_compound Average power Output power Wireless Electronics Electrical and Electronic Engineering Packaged device Harvesters Aluminum nitride Whole systems Microelectromechanical systems Energy recovery TS - Technical Sciences Industrial Innovation Aluminium nitride business.industry Energy harvesting Sensors Mechanical Engineering Electrical engineering Mechatronics Mechanics & Materials Piezoelectric vibration Electronic Optical and Magnetic Materials Vibration chemistry Mechanics of Materials Vacuum package Autonomous sensors Atmospheric pressure business |
Zdroj: | Journal of Micromechanics and Microengineering, 10, 20 |
Popis: | This paper describes the characterization of thin-film MEMS vibration energy harvesters based on aluminum nitride as piezoelectric material. A record output power of 85 μW is measured. The parasitic-damping and the energy-harvesting performances of unpackaged and packaged devices are investigated. Vacuum and atmospheric pressure levels are considered for the packaged devices. When dealing with packaged devices, it is found that vacuum packaging is essential for maximizing the output power. Therefore, a wafer-scale vacuum package process is developed. The energy harvesters are used to power a small prototype (1 cm\3 volume) of a wireless autonomous sensor system. The average power consumption of the whole system is less than 10 μW, and it is continuously provided by the vibration energy harvester. © 2010 IOP Publishing Ltd. |
Databáze: | OpenAIRE |
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