Vacuum-packaged piezoelectric vibration energy harvesters: Damping contributions and autonomy for a wireless sensor system

Autor: R. van Schaijk, C de Nooijer, Dennis Hohlfeld, S. Matova, TM Talal Kamel, M. Goedbloed, L. Caballero, Valer Pop, M. Renaud, M. Jambunathan, R. Elfrink
Přispěvatelé: IMEC/Holst Centre, Eindhoven, Netherlands
Jazyk: angličtina
Rok vydání: 2010
Předmět:
Materials science
Vacuum
Damping contribution
Wireless sensor system
Energy Harvester
Piezoelectricity
Mechanical engineering
Vacuum packaging
HOL - Holst
Vibration energies
High Tech Systems & Materials
Wafer-scale
Damping
Nitrides
chemistry.chemical_compound
Average power
Output power
Wireless
Electronics
Electrical and Electronic Engineering
Packaged device
Harvesters
Aluminum nitride
Whole systems
Microelectromechanical systems
Energy recovery
TS - Technical Sciences
Industrial Innovation
Aluminium nitride
business.industry
Energy harvesting
Sensors
Mechanical Engineering
Electrical engineering
Mechatronics
Mechanics & Materials

Piezoelectric vibration
Electronic
Optical and Magnetic Materials

Vibration
chemistry
Mechanics of Materials
Vacuum package
Autonomous sensors
Atmospheric pressure
business
Zdroj: Journal of Micromechanics and Microengineering, 10, 20
Popis: This paper describes the characterization of thin-film MEMS vibration energy harvesters based on aluminum nitride as piezoelectric material. A record output power of 85 μW is measured. The parasitic-damping and the energy-harvesting performances of unpackaged and packaged devices are investigated. Vacuum and atmospheric pressure levels are considered for the packaged devices. When dealing with packaged devices, it is found that vacuum packaging is essential for maximizing the output power. Therefore, a wafer-scale vacuum package process is developed. The energy harvesters are used to power a small prototype (1 cm\3 volume) of a wireless autonomous sensor system. The average power consumption of the whole system is less than 10 μW, and it is continuously provided by the vibration energy harvester. © 2010 IOP Publishing Ltd.
Databáze: OpenAIRE