Si moulds for glass and polymer microlenses replication
| Autor: | Christophe Gorecki, L. Nieradko, Virginia Gomez, Juha Pietarinen, Jorge Albero, Heidi Ottevaere |
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| Přispěvatelé: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Department of Applied Physics and Photonics, Vrije Universiteit Brussel (VUB), Department of Physics, University of Joensuu, Hugo Thienpont, Peter Van Daele, Jürgen Mohr, Mohammad R. Taghizadeh, Applied Physics and Photonics |
| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Fabrication Silicon chemistry.chemical_element 02 engineering and technology 01 natural sciences law.invention 010309 optics Optics SILICON KOH H2O law Etching (microfabrication) 0103 physical sciences Wafer [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Microlens chemistry.chemical_classification business.industry Polymer 021001 nanoscience & nanotechnology Isotropic etching chemistry [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic Optoelectronics Photolithography 0210 nano-technology business |
| Zdroj: | Proc. of SPIE Micro-Optics 2008 Micro-Optics 2008, May 2008, Strasbourg, France. pp.000 Vrije Universiteit Brussel |
| Popis: | The concept of the fabrication process of glass microlenses integrated with silicon and polymer replicas is presented. These kinds of microlenses are formed using a silicon master which is wet etched in alkaline solutions (anisotropic etching) and/or in acid solutions (isotropic etching). The control of the times and the selection of the solutions, joined with the designs of the mask for conventional photolithography and the quality of the silicon wafers are the key for obtaining the desired shapes and sizes. The fabricated moulds are used to replicate microlenses in polymer by the standard well known replication technologies and also to fabricate glass microlenses integrated on a silicon frame. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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