Optimization of the batch production of silicon fiber-top MEMS devices
| Autor: | Steven V. Beekmans, R. Verdoold, J.H. Rector, Martin Slaman, Davide Iannuzzi |
|---|---|
| Přispěvatelé: | Physics and Astronomy, Photo Conversion Materials, Biophotonics and Medical Imaging, Amsterdam Neuroscience - Brain Imaging, LaserLaB - Biophotonics and Microscopy |
| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
Fabrication
Optical fiber Cantilever Materials science Silicon chemistry.chemical_element 02 engineering and technology 01 natural sciences law.invention 010309 optics Reliability (semiconductor) law 0103 physical sciences Fiber SDG 7 - Affordable and Clean Energy Electrical and Electronic Engineering Process engineering Microelectromechanical systems business.industry Mechanical Engineering 021001 nanoscience & nanotechnology Electronic Optical and Magnetic Materials chemistry Mechanics of Materials 0210 nano-technology Batch production business |
| Zdroj: | Rector, J H, Slaman, M, Verdoold, R, Iannuzzi, D & Beekmans, S V 2017, ' Optimization of the batch production of silicon fiber-top MEMS devices ', Journal of Micromechanics and Microengineering, vol. 27, no. 11, 115005 . https://doi.org/10.1088/1361-6439/aa8c4e Journal of Micromechanics and Microengineering, 27(11):115005. IOP Publishing Ltd. |
| ISSN: | 0960-1317 |
| DOI: | 10.1088/1361-6439/aa8c4e |
| Popis: | We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. The procedure relies on the approach introduced earlier by our group (Gavan et al 2011 Opt. Lett. 36 2898-900), which has been optimized here to obtain higher yield and increased reliability. We describe in details the eight steps of the procedure and we show its application to the fabrication of several cantilever-based structures. Overall, we report a process yield of 80% functioning MEMS devices in our final batch. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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