Evaluation of Interface Trap Density in Advanced SOI MOSFETs
| Autor: | Matteo Valenza, Sungjae Chang, Sorin Cristoloveanu, Maryline Bawedin, Jong-Hyun Lee, Frédéric Martinez |
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| Přispěvatelé: | Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Micro électronique, Composants, Systèmes, Efficacité Energétique (M@CSEE), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2011 |
| Předmět: |
010302 applied physics
Materials science Interface (Java) business.industry Silicon on insulator 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences [SPI.TRON]Engineering Sciences [physics]/Electronics 0103 physical sciences Trap density Optoelectronics 0210 nano-technology business ComputingMilieux_MISCELLANEOUS |
| Zdroj: | 219th ECS Meeting 219th ECS Meeting, 2011, Montreal, Canada. pp.103-108, ⟨10.1149/1.3570783⟩ |
| ISSN: | 1938-6737 1938-5862 |
| Popis: | The density of traps at the top interface is difficult to assess in advanced SOI MOSFETs with high-K dielectric and ultrathin film. Searching for a characterization strategy, we compare various approaches: front-channel subthreshold slope, back-channel slope, and coupling coefficient between the front and back channels. The back-channel slope shows the largest variation with the front trap density. However, the resolution may not be sufficient for MOSFETs with very thin buried oxide. |
| Databáze: | OpenAIRE |
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