Low-cost approach for integrated long-wavelength infrared sensor arrays
| Autor: | Ingo Herrmann, Martin Eckardt, F. Freund, Dayo Oshinubi, Edda Sommer, Volker Krüger, U. Kunz, Ando Feyh, K.-F. Reinhart, Tjalf Pirk |
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| Jazyk: | angličtina |
| Předmět: |
Materials science
Thermal imaging Infrared Cost approach 02 engineering and technology 01 natural sciences Infrared point sensor Hardware_INTEGRATEDCIRCUITS Electronic engineering Engineering(all) Sensor Microelectromechanical systems Far-infrared-array business.industry 010401 analytical chemistry Process (computing) General Medicine Semiconductor production 021001 nanoscience & nanotechnology Automotive safety 0104 chemical sciences Long wavelength MEMS Optoelectronics 0210 nano-technology business |
| Zdroj: | Procedia Engineering |
| ISSN: | 1877-7058 |
| DOI: | 10.1016/j.proeng.2010.09.204 |
| Popis: | A new low-cost process for mid resolution FIR-Arrays for thermal imaging in the LWIR range (8- 14 μm) has been developed. Integrated array devices with 1k and 5k pixel array size have been designed and manufactured using this process which is fully compatible with semiconductor production. The devices are suitable to support detection of humans e.g. in security and automotive safety applications. |
| Databáze: | OpenAIRE |
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