Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines
| Autor: | Roman Antipenkov, Matej Jurkovič, Jakob Andreasson, Luca Poletto, Steffen Richter, Ondrej Hort, Shirly Espinoza, Nicola Fabris, D. D. Mai, Fabio Frassetto, Ondrej Finke, Fabio Samparisi, Anna Zymaková, Jaroslav Nejdl, Mateusz Rebarz, M. Albrecht |
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| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
02 engineering and technology 01 natural sciences law.invention Optics Ellipsometry law 0103 physical sciences Materials Chemistry High harmonic generation Electrical and Electronic Engineering Instrumentation 010302 applied physics business.industry Process Chemistry and Technology Polarizer 021001 nanoscience & nanotechnology Laser Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Harmonics Harmonic Vacuum chamber 0210 nano-technology business Den kondenserade materiens fysik Beam (structure) |
| Popis: | In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer’s Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer’s Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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