Atomic force microscope based nanomanipulator for mechanical and optical lithography

Autor:	S. Burghardt, F. J. Rubio-Sierra, Robert W. Stark, A. Kempe, Wolfgang M. Heckl
Předmět:	Nanolithography Nanomanipulator Materials science Optical microscope law Nanotechnology Photoablation Microbeam Photolithography Actuator law.invention Haptic technology
Zdroj:	Scopus-Elsevier
Popis:	An atomic force microscope (AFM) based system has been built for the manipulation of materials at the nanometer scale. The AFM is combined with an inverse optical microscope and an UV-laser microbeam system for photoablation. The actuators of the AFM are controlled using a digital signal processor. Real-time routines and a graphical user interface have been programmed for high resolution imaging and nanomanipulation. The nanomanipulation can be pre-programmed offline or directly performed using a low-cost haptic interface. In this paper, we discuss the whole system and the different methods for manipulation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::75a894c4c0d9f1510a679f055d734ab2 http://www.scopus.com/inward/record.url?eid=2-s2.0-20344363191&partnerID=MN8TOARS Zobrazit plný text záznamu