The electrical conduction and dielectric strength of SU-8
| Autor: | Jan Visschers, Joost Melai, Sander M. Smits, Cora Salm, Jurriaan Schmitz |
|---|---|
| Rok vydání: | 2009 |
| Předmět: |
Materials science
Dielectric strength business.industry Mechanical Engineering Gate dielectric Electrical engineering Thermionic emission Dielectric EWI-15371 Electronic Optical and Magnetic Materials Mechanics of Materials Electrical resistivity and conductivity SC-RID: Radiation Imaging detectors IR-61330 Electrical and Electronic Engineering Composite material Electric current business High-κ dielectric Leakage (electronics) |
| Zdroj: | Journal of micromechanics and microengineering, 19(6), 065012-065018. Institute of Physics (IOP) |
| ISSN: | 0960-1317 |
| Popis: | This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further determined the dielectric strength of SU-8 to be 4.4 MV cm−1. The remarkably high dielectric strength allows the material to be used for high-voltage applications. |
| Databáze: | OpenAIRE |
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