Displacement mechanical amplifiers designed on poly-silicon
| Autor: | S. V. Koshevaya, Ramon Cabello-Ruiz, Alfonso Torres-Jacome, Margarita Tecpoyotl-Torres, Pedro Vargas-Chable, Gerardo Vera-Dimas |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
Materials science General Computer Science Silicon Amplifier Acoustics Compliant mechanism chemistry.chemical_element Compliant mechanisms Frequency Accelerometer Displacement (vector) MEMS Sensitivity chemistry Workbench Sensitivity (control systems) Electrical and Electronic Engineering |
| Popis: | Using Poly-Silicon, the implementation of novel Displacement-amplifying Compliant Mechanisms (DaCM), in two geometries of accelerometers, allows for remarkable improvements in their operation frequency and displacement sensitivity, with different proportions. Similar DaCM´s geometries were previously implemented by us with Silicon. In all mentioned cases, the geometries of DaCM´s are adjusted in order to use them with Conventional Capacitive Accelerometer (CCA) and Capacitive Accelerometer with Extended Beams (CAEB), which operate in-plane mode, (y-axis). It should be noted that CAEB shows improvements (95.33%) in displacement sensitivity compared to ACC. Simulations results, carried out using Ansys Workbench software, validate the system’s performance designed with Poly-Silicon. Finally, a comparison with the similar systems, previously designed with Silicon, is also carried out. |
| Databáze: | OpenAIRE |
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