Correlation lengths, porosity and water adsorption in TiO 2 thin films prepared by glancing angle deposition
| Autor: | González-García, L., González-García, Lola, Parra-Barranco, J., Sánchez-Valencia, J. R., Barranco, Ángel, Borrás, Ana, González-Elipe, Agustín R., García-Gutiérrez, Mari Cruz, Hernández, Jaime J., Rueda, Daniel R., Ezquerra, Tiberio A. |
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| Rok vydání: | 2012 |
| Předmět: |
Materials science
Nanostructure Surface Properties chemistry [Nanostructures] Statistics as Topic Bioengineering law.invention Optics Adsorption law Materials Testing methods [Refractometry] Deposition (phase transition) ddc:530 General Materials Science Particle Size Electrical and Electronic Engineering Composite material Thin film Porosity Titanium titanium dioxide business.industry Mechanical Engineering chemistry [Water] Water Membranes Artificial General Chemistry chemistry [Titanium] Characterization (materials science) Anti-reflective coating ultrastructure [Nanostructures] Mechanics of Materials Grazing-incidence small-angle scattering business |
| Zdroj: | Digital.CSIC. Repositorio Institucional del CSIC instname Nanotechnology 23, 205701 (2012). doi:10.1088/0957-4484/23/20/205701 |
| DOI: | 10.1088/0957-4484/23/20/205701 |
| Popis: | This paper reports a thorough microstructural characterization of glancing angle deposited (GLAD) TiO 2 thin films. Atomic force microscopy (afm), grazing-incidence small-angle x-ray scattering (GISAXS) and water adsorption isotherms have been used to determine the evolution of porosity and the existence of some correlation distances between the nanocolumns constituting the basic elements of the films nanostructure. It is found that the deposition angle and, to a lesser extent, the film thickness are the most important parameters controlling properties of the thin film. The importance of porosity and some critical dimensions encountered in the investigated GLAD thin films is highlighted in relation to the analysis of their optical properties when utilized as antireflective coatings or as hosts and templates for the development of new composite materials. © 2012 IOP Publishing Ltd. We thank the Junta de Andaluc´ıa (projects P09-CTS- 5189, TEP5283 and FQM-6900) and the Ministry of Science and Innovation (projects CONSOLIDER CSD2008-00023, MAT2008-06652, MAT2010-21228 and MAT2010-18447) for financial support. The experiments performed at BW4 in HASYLAB (DESY) were supported by the European Community [Contract RII3-CT-2004–506008 (IASFS)]. We thank J Perlich for his support during the measurements at HASYLAB. |
| Databáze: | OpenAIRE |
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