Multidirectional UV-LED lithography using an array of high-intensity UV-LEDs and tilt-rotational sample holder for 3-D microfabrication
| Autor: | Jun Ying Tan, Jungkwun Kim, Sabera Fahmida Shiba |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Diffraction
Materials science Biomedical Engineering 02 engineering and technology Photoresist Millimeter thick photoresist process lcsh:Technology Collimated light law.invention Biomaterials 03 medical and health sciences law Lithography UV-LED lithography 030304 developmental biology 0303 health sciences business.industry lcsh:T 021001 nanoscience & nanotechnology Lens (optics) 3D microfabrication Light intensity Optoelectronics 0210 nano-technology business Light-emitting diode Microfabrication |
| Zdroj: | Micro and Nano Systems Letters, Vol 8, Iss 1, Pp 1-12 (2020) |
| ISSN: | 2213-9621 |
| DOI: | 10.1186/s40486-020-00107-y |
| Popis: | This paper presents a computer-controlled multidirectional UV-LED lithography system for 3-D microfabrication. The presented UV-LED system has adopted adjustable or programmable high-intensity UV-LEDs as a light source enabling for photopatterning both thin and thick SU-8 photoresist process. The prototype of the proposed system comprises 5-by-5 surface-mounted type LEDs with customized collimation lens, a tilt-rotational sample holder for introducing multidirectional light exposure, and a computer-control asset for synchronized controls of the light source and the sample holder. An adjustable light intensity provides an ease of lithography both for a few micron feature size patterning and a millimeter thick photopatterning by providing optimal light exposure condition by considering diffraction, and absorption of the UV light. Together with the tilt-rotational sample holder, the multidirectional UV-LED lithography can fabricate various 3-D microstructures in a wide range of the photoresist film thickness. The 3-D fabrications include an array of micro triangle slabs, 1-mm tall pillar array, the different scale same 3-D geometry structures on the same substrate. |
| Databáze: | OpenAIRE |
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