Nonvolatile flash memory based on biologically integrated hierarchical nanostructures
Autor: | Kiyotaka Shiba, Atsushi Miura, Megumi Fukuta, Mitsuhiro Okuda, Yukiharu Uraoka, Takashi Fuyuki, Shigeo Yoshii, Ichiro Yamashita, Ken-Ichi Sano |
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Rok vydání: | 2013 |
Předmět: |
Materials science
Fabrication Nanostructure Silicon chemistry.chemical_element Nanoparticle Nanotechnology Surfaces and Interfaces Condensed Matter Physics Flash memory Nanostructures chemistry Microscopy Electron Transmission Semiconductors Gate oxide Monolayer Hardware_INTEGRATEDCIRCUITS Electrochemistry General Materials Science Volatilization Layer (electronics) Spectroscopy |
Zdroj: | Langmuir : the ACS journal of surfaces and colloids. 29(40) |
ISSN: | 1520-5827 |
Popis: | The first six peptides of multifunctional titanium binding peptide-1 bestowed recombinant L-ferritin, minT1-LF, was genetically engineered and used to fabricate multilayered nanoparticle architecture. The multifunctionality of minT1-LF enables specific binding of nanoparticle-accommodated minT1-LF to the silicon substrate surface and wet biochemical fabrication of gate oxide layer by its biomineralization activity. Three-dimensional (3D) nanoparticle architecture with multilayered structure was fabricated by the biological layer-by-layer method and embedded in a metal oxide–semiconductor device structure as a charge storage node of a flash memory device. The 3D-integrated multilayered nanoparticle architecture successfully worked as a charge storage node in flash memory devices that exhibited improved charge storage capacity compared with that of a conventional monolayer structure device. |
Databáze: | OpenAIRE |
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