Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry
| Autor: | Ohhun Kwon, Miyeon Jang, Jihoon Park, Chungsik Yoon |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
By-product
Trade secret Photoresist Semiconductor industry 03 medical and health sciences 0302 clinical medicine Hazardous waste Chemical products 030212 general & internal medicine Safety Risk Reliability and Quality Material safety data sheet Chemical Health and Safety Waste management Chemical abstracts service lcsh:Public aspects of medicine Public Health Environmental and Occupational Health lcsh:RA1-1270 Semiconductor 030210 environmental & occupational health Environmental science Original Article Safety Research Working environment |
| Zdroj: | Safety and Health at Work, Vol 10, Iss 1, Pp 114-121 (2019) Safety and Health at Work |
| ISSN: | 2093-7911 |
| Popis: | Background: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material safety data sheets (MSDSs) and analytical results. Methods: A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results: Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion: We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment. Keywords: By-product, Material safety data sheet, Photoresist, Semiconductor, Trade secret |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|