Crystalline/Amorphous Si Integrated Optical Couplers for 2D/3D Interconnection
| Autor: | Yusuke Hayashi, Junichi Suzuki, Kazuto Itoh, Shigehisa Arai, Naoya Hojo, Nobuhiko Nishiyama, Tomohiro Amemiya, Yuki Kuno |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Coupling Interconnection Materials science Silicon business.industry multilayer chemistry.chemical_element Optical ring resonators nonlinearity 01 natural sciences Waveguide (optics) trident Atomic and Molecular Physics and Optics law.invention Amorphous solid 010309 optics Optics chemistry a-Si:H waveguide law Etching (microfabrication) 0103 physical sciences Electrical and Electronic Engineering business |
| Zdroj: | IEEE Journal of Selected Topics in Quantum Electronics. 22(No. 6):4403209 |
| ISSN: | 1077-260X |
| Popis: | The in-plane and interlayer waveguide-type couplers between crystalline Si and amorphous-Si:H wire waveguides, for 2D/3D hybrid-material integration are presented in this paper. The in-plane–type coupler achieves stable coupling between two waveguides by using tapers located at the tips of the waveguides. The interlayer-type coupler can connect two waveguides, despite an interlayer distance of 1 μm, with a simple process flow, by introducing a trident structure. An experiment was conducted in which the in-plane and interlayer-type couplers realized low coupling losses (coupling efficiencies) of 0.16 dB (96%) and 0.49 dB (89%) per coupler, respectively. |
| Databáze: | OpenAIRE |
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