A 0.35-m CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
| Autor: | Jaume Verd, Jaume Segura, Sebastia Bota, Rafel Perelló-Roig, Joan Barcelo |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Fabrication
Materials science Capacitive sensing lcsh:Mechanical engineering and machinery MEMS resonators 02 engineering and technology pierce oscillator 01 natural sciences Article Resonator 0103 physical sciences CMOS-MEMS lcsh:TJ1-1570 Electrical and Electronic Engineering mass sensors 010302 applied physics business.industry Mechanical Engineering 021001 nanoscience & nanotechnology Noise floor Computer Science::Other CMOS Control and Systems Engineering Equivalent weight Optoelectronics Pierce oscillator 0210 nano-technology business Sensitivity (electronics) |
| Zdroj: | Micromachines Micromachines, Vol 9, Iss 10, p 484 (2018) Jaume Verd Volume 9 Issue 10 |
| Popis: | This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg· cm&minus 2· Hz&minus 1. The resonator is embedded in a fully on-chip Pierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency stability of 1.2 Hz (0.63 ppm) in air conditions, corresponding to an equivalent mass noise floor as low as 300 pg· 2. The monolithic CMOS-MEMS sensor device is fabricated using a commercial 0.35-&mu m 2-poly-4-metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring low cost, batch production, fast turnaround time, and an easy platform for prototyping distributed mass sensors with unprecedented mass resolution for this kind of devices. |
| Databáze: | OpenAIRE |
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