Autor: |
Lars Hecht, Markus Böl, Mayra Garcés-Schröder, Anke Vierheller, Andreas Dietzel, Monika Leester-Schädel |
Jazyk: |
angličtina |
Rok vydání: |
2017 |
Předmět: |
|
Zdroj: |
Proceedings, Vol 1, Iss 4, p 385 (2017) |
ISSN: |
2504-3900 |
Popis: |
In-plane shape memory alloy (SMA) actuators operated in agonist-antagonist mode are integrated on silicon micro-grippers. The actuator elements are cut out of sheet material in a femtosecond laser ablation process. The assembly process is carried out on wafer-level, and the fixation realized by galvanic riveting. The initial deformation of the differential actuators needed to access their actuation potential is implemented during the gripper connection to energy supply. |
Databáze: |
OpenAIRE |
Externí odkaz: |
|