In-situ growth of platinum with hierarchical porosity for low impedance biomedical microelectrode fabrication
| Autor: | Frederik Ceyssens, Sreeprasanth Pulinthanathu Sree, Lisa Geerts, Johan A. Martens, Robert Puers |
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| Přispěvatelé: | Barsony, I, Zolnai, Z, Battistig, G |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science Nanoporous 020209 energy Sintering chemistry.chemical_element Nanotechnology 02 engineering and technology General Medicine molecular self-assembly Atomic layer deposition Microelectrode hierarchical porosiity chemistry Chemical engineering Electrode 0202 electrical engineering electronic engineering information engineering Platinum Porosity Engineering(all) |
| Popis: | We report a novel process that allows depositing hierarchically porous platinum, i.e. platinum with structured pores from about 1 micron down to 3 nm in porosity, in situ on flexible microelectrodes. The process is based on molecular self-assembly of a porous silica zeotile, which is then deposited on the electrode contacts of flexible platinum electrode arrays fabricated with classic lithographic techniques. The pores are then Pt filled using atomic layer deposition (ALD) and the silica mold is removed chemically. Compared to our earlier work, the in-situ ALD step improves adhesion and allows a lower temperature budget as no sintering is required. An up to 1000x reduction in electrode impedance was measured as well as a 12x increase in charge injection capacity. publisher: Elsevier articletitle: In-situ Growth of Platinum with Hierarchical Porosity for Low Impedance Biomedical Microelectrode Fabrication journaltitle: Procedia Engineering articlelink: http://dx.doi.org/10.1016/j.proeng.2016.11.366 content_type: article copyright: © 2016 The Author(s). Published by Elsevier Ltd. ispartof: pages:1122-1126 ispartof: Procedia Engineering vol:168 pages:1122-1126 ispartof: Eurosensors location:HUNGARY, Budapest date:4 Sep - 7 Sep 2016 status: published |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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