Fabricating programmed micro-defects on a line and space pattern with an ultra-low line edge roughness <1 nm
| Autor: | Takayuki Uchiyama, Susumu Iida |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Standard sample
Materials science business.industry lcsh:Electronics lcsh:TK7800-8360 Condensed Matter Physics Space (mathematics) Line edge roughness Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials stomatognathic diseases Optics lcsh:Technology (General) Micro defects lcsh:T1-995 Electrical and Electronic Engineering Line (text file) business |
| Zdroj: | Micro and Nano Engineering, Vol 3, Iss, Pp 44-49 (2019) |
| ISSN: | 2590-0072 |
| Popis: | Standard samples with programmed micro-defects were fabricated for evaluating the defect detection capability of the next generation of pattern inspection tools. A 1.5-nm protrusion programmed defect and a 4-nm-wide ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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