Porous Alumina Template based Versatile and Controllable Direct Synthesis of Silicon nanowires
| Autor: | Ki-Hwan Kim, Marc Châtelet, Costel Sorin Cojocaru, Emmanuel Lefeveure |
|---|---|
| Přispěvatelé: | NanoMaDe, Laboratoire de physique des interfaces et des couches minces [Palaiseau] (LPICM), École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS)-École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Amorphous silicon
Materials science Nanostructure Silicon chemistry.chemical_element Nanoparticle Nanotechnology 02 engineering and technology Chemical vapor deposition Tungsten 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences chemical vapor deposition (CVD) deposition 0104 chemical sciences chemistry.chemical_compound Nanopore Si nanostructure chemistry [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] Deposition (phase transition) 0210 nano-technology |
| Zdroj: | MRS Online Proceedings Library MRS Online Proceedings Library, 2012, 1439 (1), ⟨10.1557/opl.2012.940⟩ |
| Popis: | Highly densely packed, self-organized silicon nanowires with very narrow diameter distribution were synthesized within porous anodic alumina templates with electrodeposited catalytic metal nanoparticles. For successful catalytic metal nanoparticle deposition, electrochemical-, and chemical barrier layer thinning process was investigated following anodization process. Controlled pulsed electrodeposition process was carried out for a volume calibration of desired catalytic metal nanoparticle deposition inside nanopore arrays using different metal-ion containing electrolyte. Not only single metal nanoparticles, but also multi metal nanoparticles layers were filled inside PAA to enhance metal filling aspect, and to control the volume of nanoparticles more precisely. Using multilayered metal nanoparticles resulted on different SiNW’s growth behavior depending on the types of underlying metal nanoparticles.SiNWs were successfully synthesized using hot-filament assisted chemical vapor deposition system. Although silicon precursor gas can generally be dissociated at relatively low temperatures, the use of a hot filament activation help decreasing process temperature, and also, highly activated atomic hydrogen generation via the tungsten hot filament placed at gas inlet helps preventing parasitic amorphous silicon deposition on either the alumina membrane surface or the pore wall which hinders appropriate growth of SiNWs in PAA by nanopores clogging. Such densely packed, self-organized SiNWs are of high interest in many application fields like nanoelectronics, optoelectronics, and energy storage/conversion devices etc. |
| Databáze: | OpenAIRE |
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