Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method
| Autor: | Gabriel Prodan, Sebastian Cozma, Aurelia Mandes, Rodica Vlǎdoiu, Vilma Buršíková, Virginia Dinca |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Silicon Scanning electron microscope chemistry.chemical_element Thermionic emission 02 engineering and technology 01 natural sciences lcsh:Technology Article 0103 physical sciences General Materials Science Composite material Thin film lcsh:Microscopy lcsh:QC120-168.85 010302 applied physics lcsh:QH201-278.5 lcsh:T Pt Vacuum arc Nanoindentation 021001 nanoscience & nanotechnology 3. Good health Characterization (materials science) TVA chemistry morphological properties Transmission electron microscopy lcsh:TA1-2040 lcsh:Descriptive and experimental mechanics lcsh:Electrical engineering. Electronics. Nuclear engineering 0210 nano-technology lcsh:Engineering (General). Civil engineering (General) lcsh:TK1-9971 PtTi thin films |
| Zdroj: | Materials Materials, Vol 13, Iss 1796, p 1796 (2020) Volume 13 Issue 7 |
| ISSN: | 1996-1944 |
| Popis: | The current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM). The quantitative elemental microanalysis was done using energy-dispersive X-ray spectroscopy (EDS). The tribological properties were studied by a ball-on-disc tribometer, and the mechanical properties were measured using nanoindentation tests. The roughness, as well as the micro and nanoscale features, were characterized using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The wettability of the deposited Pt and PtTi thin films was investigated by the surface free energy evaluation (SFE) method. The purpose of our study was to prove the potential applications of Pt-based thin films in fields, such as nanoelectronics, fuel cells, medicine, and materials science. |
| Databáze: | OpenAIRE |
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