PULSED PLASMA DEPOSITION OF OXIDE HARD COATINGS

Autor:	Georg Erkens, Rainer Cremer, Dieter Neuschütz, K. Reichert
Rok vydání:	2010
Předmět:	chemistry.chemical_compound Materials science chemistry Physical vapor deposition Analytical chemistry Oxide General Medicine Thin film Sputter deposition Mass spectrometry Plasma processing Electron beam physical vapor deposition Pulsed laser deposition
Zdroj:	High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes). 14:321-332
ISSN:	1093-3611
DOI:	10.1615/hightempmatproc.v14.i4.20
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6f84cb726d42ece5705a44a7e680ff0f https://doi.org/10.1615/hightempmatproc.v14.i4.20 Zobrazit plný text záznamu