Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing
| Autor: | Mohammed Al-kharaz, Jacques Pinaton, Mustapha Ouladsine, Bouchra Ananou, Michel Combal |
|---|---|
| Přispěvatelé: | Pronostic-Diagnostic Et CommAnde : Santé et Energie (PECASE), Laboratoire d'Informatique et Systèmes (LIS), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), STMicroelectronics, Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
0209 industrial biotechnology
High interest Computer science Semiconductor device fabrication 05 social sciences 02 engineering and technology computer.software_genre Domain (software engineering) Key point ALARM 020901 industrial engineering & automation Work (electrical) Systems management [INFO.INFO-AU]Computer Science [cs]/Automatic Control Engineering 0502 economics and business Systems engineering Statistical analysis 050207 economics computer ComputingMilieux_MISCELLANEOUS |
| Zdroj: | 2019 6th International Conference on Control, Decision and Information Technologies (CoDIT) 2019 6th International Conference on Control, Decision and Information Technologies (CoDIT), Apr 2019, Paris, France. pp.1155-1160, ⟨10.1109/CoDIT.2019.8820351⟩ CoDIT |
| Popis: | Industrial alarm system management and enhancement have recently become a subject of high interest in the industrial domain as well as in the scientific research area. Alarm system performance is the key point to look at for the examination of whether they work correctly. Few research papers so far have focused on the semiconductor manufacturing process area. This paper summarizes some interesting work applied not long ago in other industries and especially those adapted to semiconductor manufacturing. It represents a concise description of semiconductor manufacturing processes, toward an understanding of the problems and challenges encountered. Furthermore, a basic statistical analysis employed to show some of alarm system performance metrics that have used, as shown in some well-known standards, to assess an alarm system performance as well as highlighting misconfigured alarms based on their recorded histories. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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