Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays
| Autor: | Saravana Balaji Basuvalingam, Srinivasan Anand, Yohan Desieres, Dennis Visser |
|---|---|
| Přispěvatelé: | Plasma & Materials Processing, Atomic scale processing, Royal Institute of Technology [Stockholm] (KTH ), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Swedish Research Council (Vetenskapsradet) [349-2007-8664, 621-2014-5078], Swedish Energy Agency (Energimyndigheten) [42028-1] |
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Amorphous silicon
Materials science Fabrication Silicon business.industry High-refractive-index polymer Nanophotonics chemistry.chemical_element 02 engineering and technology Dielectric 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics 010309 optics [SPI]Engineering Sciences [physics] chemistry.chemical_compound Optics chemistry 0103 physical sciences Optoelectronics Crystalline silicon 0210 nano-technology business Electron-beam lithography |
| Zdroj: | Optics Express, 27(4), 5353-5367. Optical Society of America (OSA) Optics Express Optics Express, 2019, 27 (4), pp.5353-5367. ⟨10.1364/OE.27.005353⟩ Optics Express, Optical Society of America-OSA Publishing, 2019, 27 (4), pp.5353-5367. ⟨10.1364/OE.27.005353⟩ |
| ISSN: | 1094-4087 |
| Popis: | International audience; Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale. |
| Databáze: | OpenAIRE |
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