Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content
| Autor: | Jaroslaw Domaradzki, Tomasz Kotwica, K. Bilewska, A. Wrona, Patrycja Pokora, Michal Mazur, Witold Posadowski, Wojciech Kijaszek, Damian Wojcieszak |
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| Rok vydání: | 2021 |
| Předmět: |
transparent electronics
Technology memristive-like effect Materials science Analytical chemistry Oxide chemistry.chemical_element 02 engineering and technology 01 natural sciences Article chemistry.chemical_compound 0103 physical sciences General Materials Science titanium Thin film 010302 applied physics Microscopy QC120-168.85 magnetron sputtering QH201-278.5 Sputter deposition Engineering (General). Civil engineering (General) 021001 nanoscience & nanotechnology Microstructure cobalt TK1-9971 Amorphous solid Descriptive and experimental mechanics chemistry Absorption edge amorphous thin film Electrical engineering. Electronics. Nuclear engineering TA1-2040 0210 nano-technology Cobalt Titanium |
| Zdroj: | Materials, Vol 14, Iss 3797, p 3797 (2021) Materials Volume 14 Issue 14 |
| ISSN: | 1996-1944 |
| DOI: | 10.3390/ma14143797 |
| Popis: | In this work, selected properties of metallic and oxide thin films based on titanium and cobalt were described. Thin-film coatings were prepared using the magnetron sputtering method. The deposition was carried out from sintered targets with different Co-content (2 at.%, 12 at.% and 50 at.%). The relation between the Ti–Co target composition and the Co-content in the metallic and oxide films was examined. There was 15–20% more cobalt in the films than in the target. Moreover, the deposition rate under neutral conditions (in Ar plasma) was even 10-times higher compared to oxidizing Ar:O2 (70:30) plasma. A comprehensive analysis of the structural properties (performed with GIXRD and SEM) revealed the amorphous nature of (Ti,Co)Ox coatings, regardless of the cobalt content in the coating. The fine-grained, homogenous microstructure was observed, where cracks and voids were identified only for films with high Co-content. Optical studies have shown that these films were well transparent (60% ÷ 80%), and the amount of cobalt in the target from which they were sputtered had a significant impact on the decrease in the transparency level, the slight shift of the absorption edge position (from 279 nm to 289 nm) as well as the decrease in their optical band gap energy (from 3.13 eV to 1.71 eV). Electrical studies have shown that in (Ti,Co)Ox thin films, a unipolar memristive-like effect can be observed. The occurrence of such effects has not been reported so far in the case of TiO2 coatings with the addition of Co. |
| Databáze: | OpenAIRE |
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