Scanning transmission helium ion microscopy on carbon nanomembranes
| Autor: | Armin Gölzhäuser, Nikolaus Meyerbröker, Annalena Wolff, André Beyer, Daniel Emmrich, Jörg K. N. Lindner |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
Aperture General Physics and Astronomy carbon nanomembranes lcsh:Chemical technology Signal lcsh:Technology Secondary electrons Full Research Paper srim simulations Nanotechnology General Materials Science lcsh:TP1-1185 Electrical and Electronic Engineering helium ion microscopy (him) lcsh:Science dark field business.industry lcsh:T Detector scanning transmission ion microscopy (stim) Dark field microscopy lcsh:QC1-999 Nanoscience Transmission electron microscopy Optoelectronics Acceptance angle lcsh:Q business Field ion microscope lcsh:Physics |
| Zdroj: | Beilstein Journal of Nanotechnology, Vol 12, Iss 1, Pp 222-231 (2021) Beilstein Journal of Nanotechnology |
| ISSN: | 2190-4286 |
| Popis: | A dark-field scanning transmission ion microscopy detector was designed for the helium ion microscope. The detection principle is based on a secondary electron conversion holder with an exchangeable aperture strip allowing its acceptance angle to be tuned from 3 to 98 mrad. The contrast mechanism and performance were investigated using freestanding nanometer-thin carbon membranes. The results demonstrate that the detector can be optimized either for most efficient signal collection or for maximum image contrast. The designed setup allows for the imaging of thin low-density materials that otherwise provide little signal or contrast and for a clear end-point detection in the fabrication of nanopores. In addition, the detector is able to determine the thickness of membranes with sub-nanometer precision by quantitatively evaluating the image signal and comparing the results with Monte Carlo simulations. The thickness determined by the dark-field transmission detector is compared to X-ray photoelectron spectroscopy and energy-filtered transmission electron microscopy measurements. Copyright © 2021, Emmrich et al. |
| Databáze: | OpenAIRE |
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