High quality graphene synthesized by atmospheric pressure CVD on copper foil

Autor: Caroline Rabot, Aziz Zenasni, Brigitte Caussat, Hugues Vergnes, Pierre Trinsoutrot, Alexandru Delamoreanu
Přispěvatelé: Laboratoire de génie chimique [ancien site de Basso-Cambo] (LGC), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Génie Chimique (LGC), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Commissariat à l'Energie Atomique et aux énergies alternatives - CEA (FRANCE), Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), MINATEC (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Ecole Polytechnique (FRANCE), Université Joseph Fourier Grenoble 1 - UJF (FRANCE), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)
Rok vydání: 2013
Předmět:
Materials science
Annealing (metallurgy)
Matériaux
chemistry.chemical_element
Nanotechnology
02 engineering and technology
Copper – Methane – Raman spectroscopy
010402 general chemistry
01 natural sciences
law.invention
symbols.namesake
[CHIM.GENI]Chemical Sciences/Chemical engineering
law
Monolayer
Materials Chemistry
Génie chimique
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Graphene oxide paper
Atmospheric pressure
Graphene
Graphene – CVD
[CHIM.MATE]Chemical Sciences/Material chemistry
Surfaces and Interfaces
General Chemistry
CVD
021001 nanoscience & nanotechnology
Condensed Matter Physics
Copper
0104 chemical sciences
Surfaces
Coatings and Films
Micro et nanotechnologies/Microélectronique
chemistry
Chemical engineering
Raman spectroscopy
symbols
0210 nano-technology
Methane
Graphene nanoribbons
Zdroj: Surface and Coatings Technology
Surface and Coatings Technology, Elsevier, 2013, vol. 230, pp. 87-92. ⟨10.1016/j.surfcoat.2013.06.050⟩
19th European Conference on Chemical Vapor Deposition (EuroCVD19)
19th European Conference on Chemical Vapor Deposition (EuroCVD19), Sep 2013, Varna, Bulgaria. pp.87-92
Surface and Coatings Technology, 2013, vol. 230, pp. 87-92. ⟨10.1016/j.surfcoat.2013.06.050⟩
ISSN: 0257-8972
1879-3347
DOI: 10.1016/j.surfcoat.2013.06.050
Popis: International audience; Graphene was synthesized at 1000 °C by Atmospheric Pressure Chemical Vapor Deposition on copper foil from methane diluted in argon and hydrogen. The influence of the main synthesis parameters was studied on 2 × 2 cm2 foils in order to obtain continuous monolayer graphenewithout crystalline defect. The uniformity, crystal quality and number of layers of graphenewere analyzed by Raman spectroscopy and Scanning Electronic Microscopy. First, an increase of the annealing pre-treatment duration induced an increase of the average size of copper grains, leading to larger graphene flakes of higher crystallinity presenting a lower number of layers. Similar evolutions of graphene characteristics were observed when decreasing the methane concentration to 20 ppm, whereas an increase of run duration led to a loss of graphene quality and to a higher number of graphene layers, confirming that graphene formation is not self-limiting on copper. An optimum hydrogen/methane ratio was found, quite different from other results of the literature, probably due to differences in the copper pre-treatment step. Finally, an optimized three step processwas developed to formmonolayer continuous graphene of high quality, successfully transposed to 7 × 7 cm2 substrates after a reactor scale-up.
Databáze: OpenAIRE
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