New tactile sensor chip with silicone rubber cover
| Autor: | Günter Zimmer, Michael Schmidt, Georg Pelz, Michael Leineweber, Holger Kappert |
|---|---|
| Přispěvatelé: | Publica |
| Rok vydání: | 2000 |
| Předmět: |
silicon micromachining
half-space model Materials science Acoustics taktiler Sensor Silikonkautschuk Silicone rubber law.invention chemistry.chemical_compound Mikrobearbeitung law Hardware_INTEGRATEDCIRCUITS Electrical and Electronic Engineering Instrumentation Normal force business.industry Metals and Alloys Electrical engineering Condensed Matter Physics Switched capacitor Chip Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surface micromachining Capacitor Contact mechanics chemistry silicone rubber layer tactile sensor business Tactile sensor |
| Zdroj: | Sensors and Actuators A: Physical. 84:236-245 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(00)00310-1 |
| Popis: | We report on a new tactile sensor chip developed for measuring distribution of forces on its surface. The chip has eight force-sensitive areas, called “taxel” with a pitch of 240 μm. Surface micromachining techniques are used to produce small cavities that work as pressure-sensitive capacitors. The process is CMOS compatible, therefore, on-chip switched capacitor circuits can be used for signal amplification. To enable transduction of normal forces to the sensitive areas, we cover the sensor chip surface with silicone rubber. First, measurements show that the sensor's output can be explained by results from contact mechanics. We demonstrate this by the simple case of a hard sphere pressed in the silicone rubber cover. The center of contact can be measured within 2 μm precision. The radius of the sphere and the load working on it can be estimated with high precision from the tactile sensor output data. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect