Preparation and characterization of nanostructured titanium nitride thin films at room temperature
| Autor: | C. D. Gutiérrez-Lazos, F. Solis-Pomar, O. Nápoles, Angel Colin, Manuel F. Meléndrez, O. Vázquez Robaina, Eduardo Pérez-Tijerina, A. Fundora |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Scanning electron microscope Nanotechnology INGENIERÍAS Y TECNOLOGÍAS 02 engineering and technology Substrate (electronics) Nitride ROOM TEMPERATURE NANOSTRUCTURES 01 natural sciences TITANIUM NITRIDE law.invention chemistry.chemical_compound X-ray photoelectron spectroscopy law THIN FILMS 0103 physical sciences Materials Chemistry Thin film Nanotecnología 010302 applied physics Process Chemistry and Technology Sputter deposition Nano-materiales equipment and supplies 021001 nanoscience & nanotechnology Titanium nitride Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Chemical engineering Ceramics and Composites Scanning tunneling microscope 0210 nano-technology |
| Zdroj: | Ceramics International. 42:7571-7575 |
| ISSN: | 0272-8842 |
| Popis: | Nanostructured TiN thin films were grown by reactive magnetron sputtering deposition on Si (100) substrate at room temperature. The nanostructured TiN thin films were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), resistivity and hydrophobicity tests. The nanostructured TiN thin films had an average grain size 4.6 nm, an average roughness of 1.3 nm, a preferential orientation in the [111] direction and also they showed hydrophobicity Type I. Fil: Solis Pomar, F.. Universidad Autónoma de Nuevo León; México Fil: Nápoles, O.. Universidad de La Habana; Cuba Fil: Vázquez Robaina, Odin. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina. Universidad de La Habana; Cuba Fil: Gutierrez Lazos, C.. Universidad Autónoma de Nuevo León; México Fil: Fundora, A.. Universidad de La Habana; Cuba Fil: Colin, Angel. Universidad Autónoma de Nuevo León; México Fil: Pérez Tijerina, E.. Universidad Autónoma de Nuevo León; México Fil: Melendrez, M. F.. Universidad de Concepción; Chile |
| Databáze: | OpenAIRE |
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