Suspended graphene on germanium: selective local etching via laser-induced photocorrosion of germanium
| Autor: | Mariusz Zdrojek, Leonid Tkachenko, Jakub Rogoża, Wlodzimierz Strupinskii, J. Binder, Iwona Pasternak, Roman Stepniewski, Jakub Sitek, Andrzej Wysmołek, Jacek M. Baranowski |
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| Rok vydání: | 2021 |
| Předmět: |
Materials science
Graphene business.industry Mechanical Engineering chemistry.chemical_element Germanium 02 engineering and technology General Chemistry 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Laser 01 natural sciences 0104 chemical sciences law.invention chemistry Mechanics of Materials law Etching (microfabrication) Optoelectronics General Materials Science 0210 nano-technology business |
| Zdroj: | 2D Materials |
| ISSN: | 2053-1583 |
| DOI: | 10.1088/2053-1583/abfedc |
| Popis: | The implementation of graphene in nanoelectromechanical systems and electronic applications requires not only techniques to fabricate high-quality monolayers, but also methods to process these layers. Nondestructive processing is especially challenging in the case of fragile suspended graphene membranes. In this work, we present a direct writing method for graphene grown on germanium that yields suspended layers without the need to transfer the graphene layer. To this end, we employ laser-induced photoelectrochemical etching which is highly selective and dissolves only germanium leaving the graphene layer intact. Only a focused continuous wave laser beam and water (or an aqueous solution) are required for the etching to proceed. Raman spectroscopy measurements were performed in-situ to monitor the etching process. These measurements reveal a dramatic increase of the graphene-related Raman bands as the graphene layer detaches from the substrate. This substantial increase indicates that the commonly observed weak Raman signal for graphene on germanium is not an inherent material property but is due to the interaction of the germanium substrate with graphene. Together with the established graphene growth on germanium, the presented direct writing method builds a complete toolbox for graphene membrane-based applications. |
| Databáze: | OpenAIRE |
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